Product Description
PECVD system technique is to make the traditional chemical vapour deposition (CVD) reaction temperature is reduced, most ordinary CVD equipment temperature at 900 ℃ or so, and, in the front of the ordinary CVD device to join the RF radio frequency induction device reaction gas ionization, plasma formation, the activity of plasma is used to promote the reaction, can make chemical vapor deposition temperature down to about 400 ℃, so the system known as the enhanced chemical vapor deposition (PECVD) technique of the system.
| Technical Parameters | Furnace Parts | ||||
| 1 | Chamber model | Open slidable chamber | 2 | Display model | 7 "touch screen |
| 3 | Max temperature | 1200℃ | 4 | Working temperature | ≤1150℃ |
| 5 | Heating rate | Suggess:10℃/Min Max：30℃/Min | 6 | Chamber move | Yes,speed is adjustable |
| 7 | Heating zone length | 200mm | 8 | Tube size | 60*1150 mm |
| 9 | Temperature accuracy | ±1℃ | 10 | Sealing way | Rapid flange seal |
| 11 |
Temperature curve | 30 segments programmable | 12 | Persisting curve | 15 curve |
| 13 | over heat alarm | have | 14 | overcurrent protection | have |
| 15 | Thermocouple Failure Protection | have |
16 | Temperature measure element | K-type thermocouple |
| 17 | Hearth Material | Imported alumina fiber | 18 | Overall dimensions | 1500*600*1000MM |
| Technical Parameters | RF power | ||||
| 1. | Signal frequency | 13.56 MHz±0.005% | 2. | outout | 5W-300W |
| 3 | Power stability | ±0.1% | 4 | efficiency | >=70% |
| 5 | Power factor | >=90% | 6 | Cooling way | Forced air cooling |
| Technical Parameters | Vacuum part | ||||
| 1 | power | 500W | 2 | Extraction rate | 2L\s |
| 3 | Ultimate vacuum | 4*10-2 Pa | |||
| Technical Parameters | Pneumatic system | ||||
| 1 | 1 ~ 3 road mass flowmeter is optional | 2 |
accuracy：±1.5% | ||
| 3 | Repeat accuracy：±0.2% | 4. | Operating differential pressure range：0.1～0.5 MPa | ||
| The whole machine system characteristics | |||||
| 1 | Positive pressure measurement | -100Kpa---100Kpa | 2 | Vacuum measurement | 10-2 Pa ～100Kpa（Support Ar measurement) |
| 3 | Positive pressure protection | support | 4 | Pressure constant | support |
| 5 | Intelligent gas path | support | 6 | Gas circuit timing | support |
| 7 | RF working time setting | support | 8 | Movement speed adjustment | support |
| 9 | highest vacuum | 4.8×10-3 Pa | 10 | Software functions | 1: rf power open time, can be set, time to stop automatically after the radio frequency power supply. |
| 2: automatic gas switch function, different temperature in different gases, or according to your requirements (optional) 3: automatic detection of vacuum degree, according to the size of the vacuum degree, automatic startup radio frequency power supply. 4: vacuum pump automatic start, according to the degree of vacuum, the system automatically determine whether need to start the vacuum pump. 5. The overpressure protection. 6: other functions according to your requirements | |||||
| FOB 18000 /USD | |||||
| Choose a different RF power, vacuum requirements, the number of air and software functions are not the same price， | |||||
Main Features
1、In-line vacuum automatic balance-----The tube vacuum real-time monitoring, automatic balance.PECVD process requirement quartz tube vacuum technique is usually between 0.1 ~ 100 pa, the type of PECVD of AIO technique will stop automatically by the vacuum pump control system of tube vacuum degree, set by the user to maintain the uniformity of film forming effect of the best.2、AIO heating control-----plasma radio frequency control, control system, gas flow control, vacuum system control has focused on a 7-inch touch screen for centralized regulation and control, coordination control - ChengYi AIO control system;
3、The intelligent gas path fault ----- each gas can timing on and off, free switch, save time and effort;
4、The timing control-----set in advance good power of the rf power and the size of the open and close time, automatically run;
5、The chamber movement speed is adjustable-----according to the experimental requirements, the user can set furnace about moving speed can be distance, at the end of the sedimentation chamber of a stove or furnace can be automatically removed sedimentary area and make samples fast cooling;
6、The whole machine structure integration-----overall length is only 1.5 meters, mobile convenience, avoid scattered assembly.Detailed Images
Machine Parts
Name: Tube furnace
Brand: Chengyi
Original: China
The latest models PECVD for ChengYi technique, combining the most domestic manufacturers of tubular PECVD system technique,
Main Features
the advantages of touch screen on a key control, the experiments prove that this structure sedimentation speed, film quality is good, pinhole is less, not easy to crack
Machine Parts
And the control part adopts ChengYi independent research and development of the experimental furnace AIO automatic intelligent control system
Main Features
make the operation more convenient, more powerful.
Certifications
Our Service
Pre-Sales Service
* Inquiry and consulting support.
* Sample testing support.
* View our Factory.
After-Sales Service
* Training how to instal the machine, training how to use the machine.
* Engineers available to service machinery overseas.
Packing & Delivery
1.by courier, like DHL,UPS,FEDEX,etc.usually,3-4 days to arrive.
2.by air to the air port,usually5-7 days to arrive.
3.by sea to sea port,ususally,15-30 days to arrive.
if you delivery time is very urgent, we suggest you choose by courier or by air.
if it not very urgent,we will suggest you choose by sea,it is very cheap
Henan Chengyi Equipment Science an Technology Ltd. is a manufacturer devoted into the research, development and produce of lab furnace and industrial furnace.
In 2009, begin to produce furnaces for university research institutes and military testing departments.
In 2013, establish the project of designing industrial continuous production furnaces.
In 2014, Henan Chengyi Laboratory Equipment Ltd. is established, aiming at the developing and sales of lab furnace.
In 2015, Henan Chengyi Equipment Science and Technology Ltd. is established to develop high technology lab furnace and industrial furnace.
In 2016, Chengyi actively exploring overseas market and got the import & export right. Chengyi Brand is praised by customers all around the world.
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FAQ
1.Paymen
We accept LC,T/T , Western Union or other agreed payment method
2.Delivery
Normally we will deliver the goods within 3-5 days.
if you need to customize, we will need 30-40 days to finish.
3.Shipment
We could supply the service of the shipment from booking container to gate-yo-gate
transportion.
4.Designs
OEM designs are welcomed.You can send your own design of equipment and LOGO,we can
open new mold and print or emboss any LOGO for you.
5.Warranty
we pack the goods in wooden cases in from.strong packing ensure shipment safety of lab
furnace.We provide technical support and quality guarantee for each user by 24 hours
after-sale service everyday.
6.Other question
Please email me or contact me about details.
Tel: 86-0371-55027794
Fax: 86-0371-55027786
Whats:+8613071020069