China Microwave Vapor Deposition Diamond Machine/ CVD Furnace
Main ProductOur Company
Henan Chengyi Equipment Science an Technology Ltd. is a manufacturer devoted into the research, development and produce of lab furnace and industrial furnace. The products are widely used by military enterprises, universities, research institutes and labs at home and abroad.
In 2009, begin to produce furnaces for university research institutes and military testing departments.
In 2013, establish the project of designing industrial continuous production furnaces.
In 2014, Henan Chengyi Laboratory Equipment Ltd. is established, aiming at the developing and sales of lab furnace.
In 2015, Henan Chengyi Equipment Science and Technology Ltd. is established to develop high technology lab furnace and industrial furnace.
In 2016, Chengyi actively exploring overseas market and got the import & export right. Chengyi Brand is praised by customers all around the world.
Main Features
1.The process is often used in the semiconductor industry to produce thin films
2.the wafer (substrate) is exposed to one or more volatile precursors
. 3.which react and/or decompose on the substrate surface to produce the desired deposit. Frequently
4.volatile by-products are also produced
5.which are removed by gas flow through the reaction chamber.
Description Of Product
Technical Parameters
Model |
PECVD |
Hearth Model |
Open type |
Display Model |
Highlight LED display |
Heating Element |
Fe-Cr-Al-Mo wire (OCr27Al7Mo2) |
Max. Temperature |
1200℃ |
Heating rate |
≤20℃ (Suggest:10℃/min) |
Dimension(mm) |
630*470*610mm |
Sealing Method |
vacuum flange |
Vacuum Air-tightness |
9.8×10-4Pa |
Control mode |
Intelligent PID auto control |
Temperature Accuracy |
±1℃ |
Temperature curve |
30 segments programmable |
over heat alarm |
Have |
Over current protection |
Have |
Thermocouple Failure Protection |
Have |
Temperature measure element |
K-type thermocouple |
Certification |
CE certification |
Power Supply |
220V 50Hz |
Tube diameter |
25mm |
Tube length |
600mm |
Heating zone length |
200mm |
Constant temperature zone length |
100mm |
Power |
3.5kw |
Weight |
65kg |
Detailed Images
Packaging & Shipping
1.by courier, like DHL,UPS,FEDEX,etc.usually,3-4 days to arrive.
2.by air to the air port,usually5-7 days to arrive.
3.by sea to sea port,ususally,15-30 days to arrive.
if you delivery time is very urgent, we suggest you choose by courier or by air.
if it not very urgent,we will suggest you choose by sea,it is very cheap.
Company Information
Our Company
Our Team
Our services
1. Online-service:24 hours.lnquiry reply within 1hour
2.After-service:Even our products have passed strict inspection,if you find the parts can not work
well, please show us the proof, we will help you to deal with it and give you satisfactory solution.
3.Sample order delivered withinn 24 hours ,order lead time within 3days,we will give corresponding compensation when overdue deliver the goods
4. All items must be returned in their original condition,in order to qualify for a refund or exchange of goods
Our Activities
Our Exhibition
Certifications
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